Performance analysis of serpentine springs compliant to out-of-plane oscillation

The performance of two serpentine type springs is comparatively investigated. The first type is composed of straight beams and the second one is composed of circular arcs. Based on comparing calculation results and simulation data, the crab-leg spring model is appropriate for evaluating the stiffness of springs. To obtain the operation mode to be the first mode, the number of turns and the opening angle of springs should be increased. The performance of springs is evaluated via analysis of mode coupling. This study is useful for choosing an appropriate serpentine spring and the stiffness calculation model for applications in microelectroemchanical sensors and actuators.