Physical characteristics of the modified glow discharge ion source

This work is concerned with a study on the operating characteristics of a self-axial extraction-type glow-discharge ion source. This compact ion source, with conical anode of various divergence angle Θ, can work under different operating conditions. An output ion beam currents I_{b} were measured at a distance d_{cc} = 5 cm from the plane cathode, and were found to be dependent upon the gas pressure p, angle Θ and the discharge current I_{d}. High ion beam currents of 85 μA and 410 μA were obtained at the optimum angle Θ=30° for discharges: [N₂ gas, p = 2.9×10¯² mbar, I_{d} = 2 mA] and [H₂ gas, p = 7.7×10¯² mbar, I_{d} = 2 mA], respectively.